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Volume 40 Issue 7
Jul.  2014
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Journal of Beijing University of Aeronautics and Astronautics  > 2014  >  40(7): 893-898.
Zhang Congpeng, Liu Tong, Li Meiboet al. Thermal characteristic of aerostatic direct-driven rotary stage[J]. Journal of Beijing University of Aeronautics and Astronautics, 2014, 40(7): 893-898. doi: 10.13700/j.bh.1001-5965.2013.0771(in Chinese)
Citation: Zhang Congpeng, Liu Tong, Li Meiboet al. Thermal characteristic of aerostatic direct-driven rotary stage[J]. Journal of Beijing University of Aeronautics and Astronautics, 2014, 40(7): 893-898. doi: 10.13700/j.bh.1001-5965.2013.0771(in Chinese)
shu

Thermal characteristic of aerostatic direct-driven rotary stage

doi: 10.13700/j.bh.1001-5965.2013.0771

  • College of Mechanical & Electrical Engineering, North China University of Technology, Beijing 100144, China

  • Received Date: 14 Jan 2014
  • Publish Date: 20 Jul 2014
    Abstract
  • In order to develop a precision aerostatic direct-driven rotary stage for precision engineering application, the thermal structure stability and forced cooling method were investigated. First, the heat generation and heat transfer characteristics of this aerostatic direct-driven rotary stage were analyzed, and finite element model of thermal characteristics was set up. The temperature field distribution in the aerostatic direct-driven rotary table was obtained. Then, according to the indirect coupling analysis method, the thermal-structural coupling deformation of the rotary stage was calculated by taking the temperature field as loading conditions. Next, through comparing thermal deformation, the aerostatic direct-driven rotary stage structure thermal stability was discussed, and an air forced convection cooling method and the gas circuit design were provided. Finally, temperature field distribution test experiments were carried out. Experimental results indicate that temperature field distribution calculator precision is high, and maximum bias of the finite element calculation is 1.93 ℃, and the air film thickness change of the thrust air bearing is less than 0.55 μm which is within the permitted range and has no effect on air bearing performance. The rear-motor aerostatic direct-driven rotary stage has good thermal stability and is suitable for industrial application.

     

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